This is FLIT - (F)PhotoLITography optics simulation application. This program is simulate a propogation of light waves in photolithograph. Program have GUI and computation as separate parts. GUI is writed in python for GTK2 widget set, and main part is writen in C. Mask is described by a vector file, that is rasterized with required resollution.
Currently application working ONLY IN LINUX enviroment. It doesn't have installer, have bugs, etc, but it worked. It REALY compute a diffraction pattern of light in photolithography device. Image of the mask pattern projected into a destination using short length ligth waves. All parameters can be changed.
Although application currently run only on linux, the porting is actually very easy. C part probably should compile on MinGW or cygwin after some small changes, or even without them. Mail me if you have some serious intention using it on windows.
Flit is licensed under GNU GPLv2.
Curent version.
Curent compiled version.
Download compled package from this site ( see Downloads section).
Program uses pygtk (for GTK2) and pygtk-libglade modules. Install it from you distribution. After you have it installed - just unpack archive.
Download&Unpack source distribution. To compile application you need standart gcc C enviroment. For GUI you need pygtk (for GTK2) and pygtk-libglade modules, install it from you distribution. Then do:
make all-drv
Flit needs to work some free software:
http://www.skencil.org/ . (It writed in python.).
Look at ${FLIT_ROOT}/modules/etc/flit.options and ${FLIT_ROOT}/modules/etc/options.flitgui . Set up path to sketch directory. It should be something like /usr/local/lib/skencil-0.6.16/
To run it just type
In ${FLIT_ROOT}/doc/intel1.lyx you will find a LYX file with shot paper about used mathematics. Sorry, currently in russian only.
Also, you can find there descr.lyx - a small description of program parametes.
Included test (located in ${FLIT_ROOT}/modules/tests/perf ) indicate, that application is probably too slow for one single computer. So the cluster/other HPC solution is needed
flitcomp_p2:DEBUG[38]: comp_main.c(main):163: End of program, EXIT 13.71 user, 0.21 system, 0:14.24 elapsed, 97% CPU
flitcomp_p3:DEBUG[38]: comp_main.c(main):163: End of program, EXIT 13.75 user, 0.21 system, 0:14.31 elapsed, 97% CPU
We will be glad to cooperate with somene, who have access to appropriate photolitograph hardware, have scientific interests in the area, want to use FLIT in everyday work. If you can check this application on real data it would be great. Or give us some information about interfaces with EDA tools.
Contact developers at: flit@zu dot org dot ru
Stanislaw Skuratov - all exept some code, mentioned below
Pavel Boldin - config file parse
Mikle Moiseev - matrix loading
Secial thanks to :
Sergey Kharitonov - math&phys work, consalting, etc.
Input parameters:
Result:
This document was generated using the LaTeX2HTML translator Version 2002-2-1 (1.70)
Copyright © 1993, 1994, 1995, 1996,
Nikos Drakos,
Computer Based Learning Unit, University of Leeds.
Copyright © 1997, 1998, 1999,
Ross Moore,
Mathematics Department, Macquarie University, Sydney.
The command line arguments were:
latex2html -split 0 flit.tex
The translation was initiated by on 2005-09-30