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FLIT: (F)PhotoLITography optics simulation application

About

This is FLIT - (F)PhotoLITography optics simulation application. This program is simulate a propogation of light waves in photolithograph. Program have GUI and computation as separate parts. GUI is writed in python for GTK2 widget set, and main part is writen in C. Mask is described by a vector file, that is rasterized with required resollution.

Status

Currently application working ONLY IN LINUX enviroment. It doesn't have installer, have bugs, etc, but it worked. It REALY compute a diffraction pattern of light in photolithography device. Image of the mask pattern projected into a destination using short length ligth waves. All parameters can be changed.

Although application currently run only on linux, the porting is actually very easy. C part probably should compile on MinGW or cygwin after some small changes, or even without them. Mail me if you have some serious intention using it on windows.

Downloads&Licensing

Flit is licensed under GNU GPLv2.

Curent version.

flit-0.2.4.tar.gz

Curent compiled version.

flit-bin-0.2.4.tar.gz

Install

First stage: Binary install

Download compled package from this site ( see Downloads section).

Program uses pygtk (for GTK2) and pygtk-libglade modules. Install it from you distribution. After you have it installed - just unpack archive.

First stage: Source install

Download&Unpack source distribution. To compile application you need standart gcc C enviroment. For GUI you need pygtk (for GTK2) and pygtk-libglade modules, install it from you distribution. Then do:

cd flit;cd modules

make all-drv

Second stage: Install support applications

Flit needs to work some free software:

3st stage: set up parameters

Look at ${FLIT_ROOT}/modules/etc/flit.options and ${FLIT_ROOT}/modules/etc/options.flitgui . Set up path to sketch directory. It should be something like /usr/local/lib/skencil-0.6.16/

4st stage: Running

To run it just type

${FLIT_ROOT}/modules/flitgui1/flitgui1.py
Where ${FLIT_ROOT} is a place where FLIT is installed.

Documentation

In ${FLIT_ROOT}/doc/intel1.lyx you will find a LYX file with shot paper about used mathematics. Sorry, currently in russian only.

Also, you can find there descr.lyx - a small description of program parametes.

TODO and Plans

Included test (located in ${FLIT_ROOT}/modules/tests/perf ) indicate, that application is probably too slow for one single computer. So the cluster/other HPC solution is needed

cpu MHz : 870.388 model name : Pentium III (Coppermine) cache size : 256 KB 

flitcomp_p2:DEBUG[38]: comp_main.c(main):163: End of program, EXIT 13.71 user, 0.21 system, 0:14.24 elapsed, 97% CPU 

flitcomp_p3:DEBUG[38]: comp_main.c(main):163: End of program, EXIT 13.75 user, 0.21 system, 0:14.31 elapsed, 97% CPU 

Future plans includes:

Contribution&cooperation

We will be glad to cooperate with somene, who have access to appropriate photolitograph hardware, have scientific interests in the area, want to use FLIT in everyday work. If you can check this application on real data it would be great. Or give us some information about interfaces with EDA tools.

Autors&Contacts

Contact developers at: flit@zu dot org dot ru

Stanislaw Skuratov - all exept some code, mentioned below

Pavel Boldin - config file parse

Mikle Moiseev - matrix loading

Secial thanks to :

Sergey Kharitonov - math&phys work, consalting, etc.

Shots

Input parameters:

Image shot01

Result:

Image shot02

Image shot03

About this document ...

FLIT: (F)PhotoLITography optics simulation application

This document was generated using the LaTeX2HTML translator Version 2002-2-1 (1.70)

Copyright © 1993, 1994, 1995, 1996, Nikos Drakos, Computer Based Learning Unit, University of Leeds.
Copyright © 1997, 1998, 1999, Ross Moore, Mathematics Department, Macquarie University, Sydney.

The command line arguments were:
latex2html -split 0 flit.tex

The translation was initiated by on 2005-09-30


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2005-09-30